The influence of SiO ₂ half wave coating on laser damage of HfO ₂/SiO ₂ high reflective film
Abstract: This study aims to investigate the effect of SiO ₂ half wave coating on the laser damage characteristics of HfO ₂/SiO ₂ high reflective films. HfO ₂/SiO ₂ high reflective film samples with different SiO ₂ half wave coverage states were prepared by electron beam evaporation technology. Laser irradiation experiments were conducted on the samples using a 1064nm pulsed laser, and characterization techniques such as scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to analyze the damage morphology, roughness changes, and differences in damage thresholds of the film layers. The research results indicate that the reasonable introduction of SiO ₂ half wave coating can effectively improve the anti laser damage performance of high reflection films, providing important reference for the design and preparation of high-performance reflection films in high-power laser systems.
2025-08-04